Wet Bench Lithography – Robotank

Details

Manufacturer
Robotank
Contact person
Chiara Nava, Andrea Scaccabarozzi
Location

Description:

The bench is equipped with 2 heated-closed loop drain chemical tanks, a faucet rinse tank and 2 dump rinse tanks.

Working principle

The bench is holding a Developing Solution Bath and a Stripper Solution Bath; both are heated and have the drain operated by PoliFab staff for solvent controlled disposal

Specifications

Supplied with DI Water at 18 MOhm

Do you have any question on this equipment?