Wet Bench Lithography – Robotank

Andrea Scaccabarozzi, Stefano Fasoli
Loading: Authorized user
Drain of reagents: Only authorized POLIFAB personnel
Yellow Room


The bench is equipped with 2 heated-closed loop drain chemical tanks, a faucet rinse tank and 2 dump rinse tanks.

Working principle

The bench is holding a Developing Solution Bath and a Stripper Solution Bath; both are heated and have the drain operated by PoliFab staff for solvent controlled disposal


Supplied with DI Water at 18 MOhm