Spin Module with Hot Plate – Sawatec SM-200/HP-200duo

The Sawatec SM-200/HP-200duo is a combination of a spin coater and a hot plate in one cabinet.

The Spin Module SM-200 allows for semi-automatic coating of thin layers, with automatic dispensing of different media and manual loading/unloading. The innovative RCCT system (Round-Closed-Chamber-Technology) effectively reduces air turbulence over the rotating substrate and improves the coating uniformity.

Features:

• Up to 50 programmes with 24 segments each can be programmed
• Process parameters: speed, acceleration, time
• Rotational direction can be selected (CW, CCW)
• RCCT system (Round-Closed-Chamber-Technology)
• Dynamic dispense arm prepared for up to 4 media lines
• Manual loading and unloading of the substrates
• Substrate fixation via vacuum and safety interlock protection

The HP-200 hotplate was developed for precise soft and hard bake processes in lithography, MEMS and similar applications. The temperature range is designed for up to 250 °C by default. The set temperature and the temperature profile have narrow margins, meaning that a high coating quality can be achieved. It can be used for substrates with a diameter of up to 200 mm and thicknesses of 18 mm at maximum.

Features:

• Temperature control with digital target and actual value display
• Automatic temperature limit switch, no overheating
• Heating ramp up possible with 20 program-steps
• Proximity as well as loading pins, adaptable to different substrate sizes
• Manual substrate fixation via vacuum

Spin Module SM-200

• Speed range: 1 to 6’000 rpm +/-1 rpm (optional 10’000 rpm for wafers smaller than 8″)
• Speed acceleration: 0 – 6’000 rpm in 0,8 sec.
• Delay: 6’000 – 0 rpm in 0,8 sec.
• Up to 50 programmes with 24 segments each
• Process time up to 7’200 seconds with 0,1 sec. steps
• Dosing time depends on pump type

Hotplate HP-200

• Temperature range: ambient temperature up to 250°C
• Temperature accuracy: +/- 0.6°C at 100°C
• Electrical driven proximity and loading pins (stroke 8 mm)
• Program controlled adjustable proximity pins (0.1 mm increments)
• Heating ramp up possible with 24 program-steps
• Pin-circle-diameters Ø 45mm (2″) / Ø 92mm (4″) / Ø 142mm (6″) / Ø 192mm (8″)