Spin Rinser Dryer – Verteq

Verteq (now Akrion)
Marco Asa, Chiara Nava
Authorized user
Wet Process


The rinser dryer is able to load a cassette of 25 6” wafers. Rinsing is performed rotating the cassette and spraying 18 MOhm DI water, drying is performed by electronic grade N2 while rotating the cassette. We own two Verteq rinse dryers, to avoid contaminations one rinse dryer is dedicated to solvents and the other one to acids.