Clean Room Equipment

PoliFab’s 370m2 clean room provides a flexible support for proof-of-concepts on materials, processes and devices, as well as a fast prototyping of innovative devices in the fields of photonics, microfluidics, lab-on-chip, micromechanics, spintronics, magneto devices, organic electronics, etc.

The clean room is divided in two adjacent areas:  the first one is a class ISO06 (150 m2) equipped with facilities for

  • optical lithography;
  • electron beam lithography;
  • wet and dry etching;
  • thin film deposition;
  • metrological characterization.

The second area is a class ISO08 220 m2, clean room which includes:

  • access and grey areas;
  • back-end;
  • magnetic thin films area.

We also own a fully equipped workshop with numerical controlled milling machine, lathe, millstone, drill press and sandblaster to produce customized mechanical elements.

Below you can find the list of all the equipment currently in use at PoliFab, each item linking to the corresponding page with details about the machine/instrument.

Equipment list