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Lithography

Lithography

RAITH

EBL System – Raith Voyager

Nanoscribe

Two-Photon 3D Printer – Nanoscribe Quantum X Shape

Heidelberg Instruments

Laser Writer – Heidelberg DWL66+

Heidelberg Instruments

Maskless Aligner – Heidelberg MLA100

Karl Süss

Mask Aligner – Karl Süss MA6/BA8

Heidelberg Instruments

NanoFrazor Explore

Sawatec

Spin Module with Hot Plate – Sawatec SM-200/HP-200duo

Sawatec

Developer Module – SAWATEC SMD-200

Karl Süss

Spin Coater – Karl Süss RC8

Sawatec

Spin Coater – Sawatec SM-150

Sawatec

Hot Plate – Sawatec HP401

PVA TePla AG

Plasma Asher – PVA TEPLA 300 AL

Zeiss

Optical Microscope – Zeiss Axio Imager.A2 Vario

Leica

Optical Microscope – Leica INM 200

PoliFAB’s Staff

UV Exposure Box – PoliFAB

SPM

Wet Bench Solvents – SPM

SPM

Wet Bench Development – SPM

Robotank

Wet Bench Lithography – Robotank

SPM

Wet Bench Lithography – SPM

Semitool

Spin Rinser Dryer – Semitool

Other areas