Etching

RIE ICP – Oxford Plasmalab 100

Oxford Instruments

Sputtering and Ion Beam Etching System – Kenosistec VS80

Kenosistec

HF Vapor Phase Etcher – Idonus VPE 100

idonus

Plasma Asher – PVA Tepla 300 Semiauto

PVA TePla AG

Wet Bench Wafer Cleaning – SPM

SPM

Wet Bench Liftoff – Robotank

Robotank

Wet Bench Multi Wafers Etching – SPM

SPM

Wet Bench Single Wafers Etching – SPM

SPM

Spin Rinser Dryer – Verteq

Verteq (now Akrion)

Spin Rinser Dryer – Semitool

Semitool

Other areas

Do you have any question on this equipment?

Contact Us