Etching

RIE ICP – Oxford Plasmalab 100

Oxford Instruments

Ion Beam Etching System – Sistec VS80

Kenosistec

HF Vapor Phase Etcher – Idonus VPE 100

idonus

Plasma Asher – PVA Tepla 300 Semiauto

PVA TePla AG

Wet Bench Wafer Cleaning – SPM

SPM

Wet Bench Liftoff – Robotank

Robotank

Wet Bench Multi Wafers Etching – SPM

SPM

Wet Bench Single Wafers Etching – SPM

SPM

Spin Rinser Dryer – Verteq

Verteq (now Akrion)

Spin Rinser Dryer – Semitool

Semitool

Other areas

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