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Polifab - Micro and nano fabrication facility
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Characterization
Characterization
Keyence
Digital Microscope – Keyence VHX-X1
lyncéè tec
Vibrometer – Lyncée Tec DHM®-R2105
Specs
ArPES System for Advanced Spectroscopy – Specs
Advanced Research Systems
Vacuum Probe Station – ARS PS-L Flow Cryostat
LEO/ZEISS and RAITH
SEM with EDX + EBL – LEO 1525 + Raith Elphy Plus
Zeiss
SEM with EDX – ZEISS Ultra55
Thermo Fisher
FIB – STRATA DB 235
Rigaku
X-Ray Diffractometer Rigaku SmartLab XE
KLA TENCOR
Profilometer – KLA Tencor P-17
Filmetrics
Thin-Film Mapping – Filmetrics F54-XY-200-UVX
J.A. Woollam
Spectroscopic Ellipsometer – J.A. Woollam VASE
Filmetrics
Optical Profiler – Filmetrics Profilm3D
Keysight Technologies
AFM System – Keysight 5600LS
Mitutoyo
Optical Microscope – Mitutoyo MF-Hyper
Leica
Optical Microscope – Leica FTM 200
Jandel
Sheet Resistance Measurement – Jandel 4-point probe
Metricon
Prism Coupler – Metricon 2010
Nikon
Optical Microscope – Nikon Eclipse ME600
SÜSS MicroTec AG
Probe Station – SÜSS MicroTec PM5
J.A. Woollam
Spectroscopic Ellipsometer – J.A. Woollam VASE (Remote Access)
Other areas
Lithography
Deposition
Etching
Characterization
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