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Polifab - Micro and nano fabrication facility
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Kulicke & Soffa
Automatic Wire Bonder – K&S Asterion
Logitech Ltd
Lapping & Polishing System – Logitech PM6
Disco
Dicing Saw – Disco DAD341
Disco
Wafer Cleaning Station – Disco DCS141
Kulicke & Soffa
Ball Bonder – Kulicke & Soffa 4124
UniTemp
Rapid Thermal Annealer – UniTemp RTP-150-HV
Carbolite Gero
Tube Furnace – Carbolite Gero KST 12/600
Nabertherm
Muffle Furnace – Nabertherm LT 9/11 SKM
Thermo Scientific Heraeus
Drying Oven – Thermo Scientific Heraeus UT 6120
Thermo Scientific Heraeus
Drying Oven – Thermo Scientific Heraeus UT 6060
PVA TePla AG
Plasma Asher – PVA TEPLA 200
Anathech USA
Sputter Coater – Anatech Hummer 6.2
POLOS
Spin Coater – POLOS SPIN150i
Semitool
Spin Rinser Dryer – Semitool
Kulicke & Soffa
Wafer Mounting Station – Kulicke & Soffa Model 961
Robotank
Wet Bench Backend – Robotank
SPM
Wet Bench Sol-Gel
Other areas
Lithography
Deposition
Etching
Characterization
Back End