Deposition

Sputtering Cluster – Evatec Clusterline 200E

Evatec

CVD – STS Multiplex

STS Ltd

E-beam Evaporator – Unaxis BAK 640

Unaxis

Thermal Evaporator – Moorfield MINILAB-080

Moorfield

Sputtering – Leybold LH Z400

Leybold

Sputtering System – AJA ATC Orion 8

AJA International Inc.

Yamamoto Wafer Electroplating Set

Yamamoto

Ceradrop – CeraPrinter F-Serie

Ceradrop

LASSE (LAyered Structures for Spin Electronics)

Wet Bench Electrodeposition – SPM

SPM

Other areas

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