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Deposition

Deposition

Beneq

ALD – Beneq TFS 200

SPTS (KLA)

PECVD – SPTS DELTA 200 LPX

Neocera

PLD System – Neocera

Createc

MBE Deposition Cluster – Createc

Polyteknik AS

Sputtering cluster – Polyteknik Flextura 200

Evatec

Sputtering Cluster – Evatec Clusterline 200E

Unaxis

E-beam Evaporator – Unaxis BAK 640

Moorfield

Thermal Evaporator – Moorfield MINILAB-080

Leybold

Sputtering – Leybold LH Z400

AJA International Inc.

Sputtering System – AJA ATC Orion 8

Yamamoto

Yamamoto Wafer Electroplating Set

Ceradrop

Ceradrop – CeraPrinter F-Serie

LASSE (LAyered Structures for Spin Electronics)

SPM

Wet Bench Electrodeposition – SPM

Other areas