Spin Rinser Dryer – Verteq

Details

Manufacturer

Verteq (now Akrion)

Website

http://www.akrionsystems.com/

Contact person

Stefano Bigoni, Chiara Nava

Location

The rinser dryer is able to load a cassette of 25 6” wafers.

Rinsing is performed rotating the cassette and spraying 18 MOhm DI water, drying is performed by electronic grade N₂ while rotating the cassette.

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