Manufacturer
Verteq (now Akrion)
Website
Contact person
Stefano Bigoni, Chiara Nava
Location
Description:
The rinser dryer is able to load a cassette of 25 6” wafers.
Rinsing is performed rotating the cassette and spraying 18 MOhm DI water, drying is performed by electronic grade N2 while rotating the cassette.
