Wet Bench Wafer Cleaning – SPM

Details

Manufacturer
SPM
Website
https://www.spm-semiconductor.it/
Contact person
Andrea Scaccabarozzi, Gianluca Cannetti
Location
Etching

Description:

The bench is equipped with:

  • 2 heated PVDF process tanks
  • 2 dump rinse tanks
  • 2 N2 spray guns
  • 2 DI-H2O spray guns
  • 4 power outlets
  • 1 vacuum connection

Specifications

  • Supplied with DI Water at 18 MOhm
  • Maximum process tank temperature: 80 °C
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