UV Exposure Box – PoliFAB


PoliFAB’s Staff
Contact person
Chiara Nava, Andrea Scaccabarozzi


Flood exposure tool – UV curing box

The UV box was designed and assembled by PoliFAB’s staff to serve necessity as UV curing system for resin hardening or UV-induced polymerisation. It is equipped with 24 high power UV LEDs providing light centered around 385nm. The box can be operated under continuous nitrogen flux in order to deplete the internal atmosphere from oxygen. The UV box can also be used for FLOOD EXPOSURES of image reversal photoresists (like AZ5214E) and SU-8 resin hardening.


  • Wafer size: up to 8 inches
  • Light source: 24 power LEDs centered at 385nm
  • Power density: 15mW/cm2 at table height. 6.5mW/cm2 at the base
  • Uniformity: +/- 30% on 6″ wafer at table height. +/- 10% on 6″ wafer at the base.

Operative instructions:

⚠ Do not turn on the UV light when the door is open!
⚠ Do not look directly at the light sources!
⚠ Always use protective goggles!
⚠ Do not place anything above the heat sink!

Open the front door and load your sample on the metal table (you may use a large sample carrier for better handling, like a metal disc).
Turn on the UV LIGHT ON switch and start a countdown timer according to your needs. Don’t forget to switch the light OFF when finished, before retrieving your sample.
Leave the front door closed after use.

AZ5214E inversion: 1min flood exposure. 2min will provide extremely good results. Tune exposure times according to your own needs!

Machine Safety:
USE PROTECTIVE GOGGLES (yellow ones, UV filtering)

Do you have any question on this equipment?