Wet Bench Lithography – SPM
Lithography

Wet Bench Lithography – SPM

Equipment details
Manufacturer
SPM
Contact person
Federico Cesura, Miriam Saleh
Category

Description:

The bench is equipped with one rinse tank, one heated process tank (not in use), one N2 and one DI-H2O spray guns.

Working principle

This bench is used for development of substrates in lithography processes.

Specifications

Supplied with DI Water at 18 MOhm

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