Wet Bench Solvents – SPM

Details

Manufacturer
SPM
Contact person
Andrea Scaccabarozzi, Gianluca Cannetti
Location

Description:

The bench is equipped with a stainless steel (AISI 316) heated process tank and a rinse-up tank, 2 DI-H2O and 2 N2 spray guns.
The front console is equipped with 4 power outlets and 2 vacuum connections.

Working principle

This wet bench is designed for cleaning processes in lithography.

Specifications

Process tank temperature: 60 °C;
Supplied with DI Water at 18 MOhm.

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