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Etching

Etching

SPTS

RIE – SPTS Omega SYNAPSE 200 LPX

SPTS

HF Vapor Etcher – SPTS Monarch3

SPTS

DRIE – SPTS Omega RAPIER 200 LPX

Kenosistec

Ion Beam Etching System – Sistec VS80

idonus

HF Vapor Phase Etcher – Idonus VPE 100

PVA TePla AG

Plasma Asher – PVA Tepla 300 Semiauto

SPM

Wet Bench Wafer Cleaning – SPM

Robotank

Wet Bench Liftoff – Robotank

SPM

Wet Bench Multi Wafers Etching – SPM

SPM

Wet Bench Single Wafers Etching – SPM

Verteq (now Akrion)

Spin Rinser Dryer – Verteq

Semitool

Spin Rinser Dryer – Semitool

Other areas