Leica INM 200 is an optical microscope with a motorized x-y stage which handles up to 6 inch wafers. The z-axis is motorized too, with z-protected autofocus. Objectives from 2.5x to 100x are available; calibrated imaging can be performed by a black/white camera. The microscope is interfaced with the IM500 software with advanced image processing capability. A further feature (presently not working) is UV imaging with 150x magnification and UV camera.