Laser Writer – Heidelberg DWL66+
Heidelberg Instruments
The Spin Modules SM-150 are the optimal choice for manual and semi-automatic coating of thin layers. All commercial photoresists and coating materials can be coated homogeneously on wafers up to 150 mm (6 inches) or 127 x 127 mm (5 x 5 inch) substrates. The process chamber is designed for a diameter of up to 176 mm. In order to keep the cleaning effort for the process chamber to a minimum, SAWATEC has developed a comprehensive and good value bowl protector. This bowl protector is easy to remove and dispose of once the process has been completed.
* Depending on the substrate size and spin chuck type